提出了一种简单而有效的消除座标测量机机构误差的新方法。它不仅适用于座标测量机,而且也适用于精密机床。论述了所有测量单元的基本原理,详细介绍了光学系统的布局原理和方法。同时,做了一系列实验,实验结果表明这种补偿方法能够有效地提高座标测量机的精度。 A simple and effective new method to eliminate the mechanism error of CMM is proposed. It applies not only to coordinate measuring machines, but also to precision machine tools. The basic principles of all measurement units are discussed, and the layout principle and method of the optical system are introduced in detail. At the same time, a series of experiments were done, the experimental results show that this compensation method can effectively improve the accuracy of CMM.