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本文用波长色散型电子探针对GaAs衬底上Ga_xIn_(1-x)P混晶膜的元素组分进行了分析,为用SEM-WDS测定该类混晶膜材料作了一次试验。
In this paper, the elemental composition of Ga_xIn_ (1-x) P mixed crystal film on GaAs substrate was analyzed by wavelength-dispersive electron probe, which was used to test this kind of mixed crystal material by SEM-WDS.