准分子激光制备纳米金刚石薄膜装备,近日在牡丹江市通过国家科委论证。该装备是在500w 级高功率旋转开关准分子激光器的基础上,运用激光 PVD 方法,制备出金刚石超微晶粒(纳米晶粒)组成的“纳米金刚石膜”。由于这种纳米金刚石膜与各种实用化衬底具有良好的附着力,因此,在摩擦磨损、工具、模具、医学及其一些红外光学涂层领域有 Excimer laser preparation of nano-diamond film equipment, recently passed the State Science and Technology Commission in Mudanjiang demonstration. The equipment is based on 500w high-power rotary switch excimer laser, the use of laser PVD method to prepare a diamond ultrafine crystal (nano-crystal) composed of “nano-diamond film.” Due to the good adhesion of such a nano-diamond film to a variety of practical substrates, there are many applications in the fields of friction and wear, tools, molds, medical science and some infrared optical coatings