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我厂氮化钛涂层设备是从美国“多弧”(MULTI-AR0)公司引进的。该设备白1986年10月投入使用以来,基本上运行正常。经过一年多的使用,我们感到该设备出问题最多的是真空系统,而其中最主要的是涂层工作室真空度下降。工作室真空度下降会造成产品质量低劣,严重时会使涂层无法进行。导致工作室真空度下降的原因有三种:脱气、泄漏、真空泵抽气性能下降。针对上述问题,我们采取了如下措施:
Our titanium nitride coating plant was introduced from the United States “MULTI-AR0” company. The device white since October 1986 put into use, basically operating normally. After more than a year of use, we felt that the most problematic of the equipment was the vacuum system, and the most important one was the decrease in vacuum in the coating studio. A decrease in the vacuum in the studio can result in poor product quality and in severe cases make the coating impossible. There are three reasons that cause the vacuum in the studio to drop: degassing, leaking, and reduced suction performance of the vacuum pump. In response to the above problems, we have taken the following measures: