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采用准分子激光对SiC陶瓷表面进行了不同脉冲数、不同单脉冲能量和不同重复频率的辐照实验,获得了SiC陶瓷的辐照损伤二维和三维表面形貌,并分析了微观作用机制。结果表明,193nm准分子激光辐照SiC陶瓷时既产生光热作用又产生光化学作用,其中光热作用占主导;SiC表面损伤的宏观形貌与激光辐照参数相关,辐照脉冲数增加或单脉冲能量增加均会加重辐照损伤,增大激光重复频率会导致辐照损伤深度略微下降。
The surface of SiC ceramic was irradiated by excimer laser with different pulse number, different single pulse energy and different repetition frequency to obtain the two-dimensional and three-dimensional surface morphology of SiC ceramic irradiated by irradiation, and the microscopic mechanism was analyzed. The results show that the 193nm excimer laser irradiation of SiC ceramics not only produce photothermal effects and photochemical effects, which dominate the photothermal effect; SiC surface damage macro morphology and laser irradiation parameters related to the number of irradiation pulses or single Increased pulse energy will increase the radiation damage, increasing the laser repetition frequency will lead to a slight decrease in the depth of radiation damage.