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利用氧等离子体作阳极氧化处理大大提高了 SAW 换能器的可靠性。使得防腐蚀层抗酸腐蚀增加了一个数量级.本文将叙述阳极氧化谐振器的频率微调,及阳极氧化延迟线的相位一频率特性曲线.
The use of oxygen plasma for anodization greatly improves the reliability of SAW transducers. Making the anticorrosion layer corrosion resistance increased by an order of magnitude.This article will describe the frequency of the anodized resonator fine-tuning, and the anodic oxidation delay line phase-frequency characteristic curve.