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现在我厂用作精密测量的0.2微米投影光学计是由东德蔡司厂1微米投影光学计改装而成的,经北京市计量处鉴定认为符合要求。这项改革的工作量不大,做法简单易行。经多年使用证明改装后精度高,示值稳定,性能良好。一、仪器的结构刻度值为0.2微米和1微米的投影光学计的光路如图1a所示。光源1通过聚光镜2和棱镜3,将位于物镜6焦平面上的刻线标尺 4照亮(刻线标尺的结构及尺寸见图1b)。根据几何光学的成燉原理(图1d)可知,当刻线标尺上的光线经物镜6射向反射镜组7和8,并由摆动反射镜8将入射光原路反回后,标尺的刻线必定在与其同一焦平面的指标线位置上成像(图1c)。此时,标尺的刻线像便和指标线重合,并由投影目镜12放大,经过倒向反射镜13、14和15,将标尺刻线和指
Now I plant for precision measurement of 0.2-micron projection optical meter by the East German Zeiss plant 1-micron projection optical meter modified made, the Beijing Municipal Measurement Office identified as meeting the requirements. The workload of this reform is not big and the practice is simple and easy. After years of use proved high precision after modification, showing the value of stability, good performance. First, the structure of the instrument Scale value of 0.2 microns and 1 micron projection optics optical path shown in Figure 1a. The light source 1 illuminates the reticle 4 located on the focal plane of the objective lens 6 through the condenser lens 2 and the prism 3 (see FIG. 1b for the structure and dimensions of the reticle). According to the theory of geometrical optics (Figure 1d), it can be seen that when the light on the reticle is directed to the mirror groups 7 and 8 by the objective lens 6 and the incident light is reversed by the swing mirror 8, The line must be imaged at the same index line position as the focal plane (Figure 1c). At this point, the scale of the ruler line coincides with the indicator line and is magnified by the projection eyepiece 12, passing through the reflecting mirrors 13, 14 and 15, and the ruler ruler and the finger