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共焦显微镜因其高分辨率和能三维立体成像的优点被广泛应用在生物、医疗、半导体等方面。文章首先分析了影响共焦显微镜分辨率的因素,主要有光源、探测器孔径和杂散光等;并结合这些因素介绍了双光子共焦显微镜、彩色共焦显微镜、荧光共焦显微镜、光纤共焦显微镜;然后从提高系统成像速度的方面介绍了波分复用共焦显微镜和频分复用共焦显微镜;最后分析了共焦显微镜的发展趋势。
Confocal microscopy is widely used in biology, medical, semiconductor and other fields for its advantages of high resolution and three-dimensional imaging. The paper first analyzes the factors affecting the resolution of confocal microscope, mainly including light source, detector aperture and stray light. Combined with these factors, two-photon confocal microscope, color confocal microscope, fluorescence confocal microscope, Then the WDM and FDM microscopy were introduced to improve the imaging speed of the system. Finally, the development trend of the confocal microscope was analyzed.