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针对微电子机械系统中微小部件运动状态的测量要求，提出了一种基于光纤Ｍｉｃｈｅｌｓｏｎ干涉仪的测量方法，分析了微机械部件不同运动状态对光信号的影响，给出了初步的实验结果。
Aiming at the requirement of measuring the movement of micro components in microelectromechanical systems, a measurement method based on optical fiber Michelson interferometer is proposed. The influence of different motion states of micromachined components on optical signals is analyzed. The preliminary experimental results are given.