扫描探针显微术(SPM)的基本原理最初在50年代由J.A.O’Keefe提出,1982年,Binnig和Rohrer等人研制成功第一台SPM——扫描隧道显微镜(STM),并因此获得了1986年诺贝尔物理学奖。此后,Binnig又与Quate等人合作,于1986年推出第一台原子力显微镜(AFM)。和STM不同,AFM是通过探测微探针针尖与被测物质表面原子之间微弱的相互作用力来得到物质表面形貌的信息,不需在样品与探针之间形成电回路,不受样品导电性的限制,因而其应用领域更为广阔。目前,AFM已发展成为一种十分重要的表面分析 The basic principle of scanning probe microscopy (SPM) was first proposed by JAO ’Keefe in the 1950s. In 1982, Binnig and Rohrer et al. Successfully developed the first SPM - scanning tunneling microscope (STM) 1986 Nobel Prize in Physics. Since then, Binnig has partnered with Quate et al. In 1986 to introduce the first atomic force microscope (AFM). Unlike STM, the AFM obtains information about the topography of a material by detecting the weak interaction between the tip of the microprobe and the atoms on the surface of the analyte without the need for an electrical circuit between the sample and the probe, independent of the sample Conductivity limits, so its application is more extensive. At present, AFM has developed into a very important surface analysis