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1.概述为满足膜厚测定高稳定度的要求,我们研制成功SF—3型监测器。由于采取10兆赫特定切角、成对晶体组装、改进装架结构和工艺、取消不稳定的LC振荡器调零、/v转换、改用大讯号混频、数字频率计直接读数等措施,本监测器在恒温31.7±0.2℃下72小时频漂标差4赫,40～-80℃双向温漂250赫,通频带15赫～200千赫。将该监测器安装在DM-450镀膜机中,实现了蒸发镀膜的精细监测。
1. Overview To meet the high stability of film thickness measurement requirements, we developed a successful SF-3-type monitor. As a result of 10 MHz specific chamfer angle, paired crystal assembly, improved rack structure and process, cancellation of unstable LC oscillator zeroing, / V conversion, switch to large signal mixing, digital frequency meter direct reading and other measures, the Monitor the temperature drift 31.7 ± 0.2 ℃ 72 hours drift standard deviation 4 Hz, 40 ~ -80 ℃ bidirectional temperature drift 250 Hz, the passband 15 Hz ~ 200 kHz. The monitor installed in the DM-450 coating machine, to achieve a fine monitoring of evaporation coating.