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采用射频溅射方法制备用作电致变色器件的LiNbO3薄膜,利用频率外推法和Wangner极化法对所沉积的LiNbO3离子导体薄膜的离子电导率进行了测试和计算,给出了薄膜的光谱特性,分析和讨论了薄膜制备工艺对薄膜结构和离子电导率的影响和作用。
The LiNbO3 thin films were prepared by radio frequency sputtering and used as electrochromic devices. The ionic conductivity of the deposited LiNbO3 thin films was measured and calculated by frequency extrapolation and Wangner polarization method. The spectra of thin films Characteristics, analysis and discussion of the film preparation process on the film structure and ionic conductivity and effect.