“科技要发展,计量须先行。”(聂荣臻语)随着80年代初第一台能探测到原子尺度的扫描隧道显微镜问世,人类认识世界的能力产生了新的飞跃。近年来各国竞相开展纳米(10~(-9)米)技术微型工程的研究。在生命科学、材料科学、微型机械及微电子技术等领域,科学家正利用纳米技术识别DNA遗传密码、证实介于晶体与非晶体之间的准分子的存在、研制微型机械与传感器探测各种信息以及更大幅度地提高微电子芯片的集成度等。可以预言,微型工程的研究与发展将 “Technology needs to be developed and measurement must be carried out first.” With the first scanning tunneling microscope capable of detecting atomic scales in the early 1980s, the ability of mankind to understand the world has taken a new leap forward. In recent years, various countries are competing to develop nano (10 ~ (-9) m) micro-engineering technology research. In the fields of life sciences, materials science, micro-mechanics and microelectronics, scientists are using nanotechnology to identify DNA genetic code, to confirm the existence of excimer molecules between crystals and non-crystallites, to develop micromechanics and sensors to detect various kinds of information As well as greatly improve the microelectronic chip integration and so on. It can be predicted that the research and development of micro-engineering will be