论文部分内容阅读
用射频溅射技术制备了ＺｒＯ２ 薄膜，用慢正电子束分析该薄膜，发现它的表层存在一高正电子吸收区，它与钇的表面富集有关，提出了相应的模型。
The ZrO2 thin film was prepared by radio frequency sputtering. The film was analyzed by slow positron beam. It was found that there was a high positron absorption region on the surface of the film. It was related to the surface enrichment of yttrium, and the corresponding model was proposed.