压阻湿度传感器Ｇ．Ｇｅｒｌａｃｈ等１．前言用于测量气体或空气中相对湿度的普通传感器，是利用电阻率的变化或与传感器周围的湿度相关的吸湿薄层的介电性质。但湿度也影响敏感层的电接触面积。因此，这些传感器的准确度，尤其是长期稳定性受到限制。为了克服这些缺点，... Piezoresistive humidity sensor G. Gerlach et al. Introduction Common sensors used to measure the relative humidity in a gas or air are the dielectric properties of a hygroscopic sheet utilizing changes in resistivity or in relation to the humidity around the sensor. However, humidity also affects the electrical contact area of ​​the sensitive layer. Therefore, the accuracy of these sensors, especially long-term stability, is limited. In order to overcome these shortcomings, ...