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发展了具有常压、低温特点的电晕放电等离子体增强化学气相沉积合成碳纳米管阵列的技术路线.以甲烷和氢气为原料,在含钴多孔阳极氧化铝模板中合成了碳纳米管阵列.扫描电子显微镜(SEM)、透射电子显微镜(TEM)、能量弥散X射线谱(EDS)和拉曼光谱(Raman)分析表明,该阵列由直径约40nm的碳纳米管构成,长度大于4μm.碳纳米管主要限制生长在模板孔道中.
The technical route of carbon nanotube array synthesis by corona discharge plasma-enhanced chemical vapor deposition with atmospheric pressure and low temperature has been developed.Carbon nanotube arrays were synthesized from templates containing cobalt porous anodic alumina using methane and hydrogen as raw materials. Scanning electron microscopy (SEM), transmission electron microscopy (TEM), energy dispersive X-ray spectroscopy (EDS) and Raman spectroscopy showed that the array consisted of carbon nanotubes with a diameter of about 40 nm and a length of more than 4 μm. Tubes are mainly restricted to grow in the template channels.