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由中科院长春光机所承担的软X射线多层膜技术的研究课题,于最近通过了技术鉴定。课题组在光学常数、模系设计理论、离子束溅射镀膜设备研制、镀膜工艺、膜系周期结构和反射率测试等方面做了大量研究、试验工作。制备的多层膜元件反射率在20纳米以上波段达到20％以上,12.5～20纳米波段达到40％以上,并在X射线激光研究和软X射线单色器中得到应用。参加鉴定会的光学专家们认为,该成果从设计理论、制备技术到测试均具系统性,并有
The research project of soft X-ray multilayer film, undertaken by Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, recently passed the technical appraisal. The research group made a great deal of research and experimental work on optical constants, mold design theory, ion beam sputtering coating equipment development, coating technology, periodic structure of membrane system and reflectivity test. The prepared multi-layer film reflectance reaches more than 20% in the waveband above 20 nm and reaches more than 40% in the waveband from 12.5 nm to 20 nm, and is used in X-ray laser research and soft X-ray monochromator. Optometry experts attending the conference believe that the results from the design theory, preparation techniques to the test are systematic, and