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本文介绍了作者于1982年11月,参加我所考察超精密加工技术的代表团去日本,了解到的日本在超精密加工机床上应用空气轴承和气浮导轨的情况。本文谈到日本和美国有关的公司认识到空气轴承的有些性能优于液体静压轴承,则在超精密加工机床上采用了空气轴承,收到了良好的效果。我们看到东芝机械株式会社制造的UFC—200P型超精密加工机床,就是采用了空气轴承。在此机床上,经过用金刚石进行超精密切削加工得到的激光镜的精度已达到0.06μm的平面度和0.01μm的表面光洁度。采用空气轴承的超精密加工机床,其精度高、刚度也足够、附加设备少、使用方便、造价低,所以很受欢迎。东芝机械株式会社生产有各种类形不同尺寸的空气轴承作为商品在出售,日立精机株式会社也制造了采用空气轴承的超精密切削机床,用于切削电子计算机磁盘。还有不二越株式会社和日本精工株式会社也有空气轴承主轴和导轨的产品。我们看到,日本几个单位用空气轴承的超精密加工机床加工出来的部件的精度和表面光洁度都很高。日本在这方面虽然比美国起步的晚,但由于急起直追,可以说日本在这方面的水平已赶上美国的水平,这并不过份。
This article describes the author’s delegation to Japan in November 1982 who participated in the ultra-precision machining technology I visited and learned of Japan’s application of air bearings and air bearing on ultra-precision machine tools. This article describes the Japanese and the United States related companies recognize that some of the performance of air bearings superior to hydrostatic bearings, the ultra-precision machine tools used in the air bearing, received good results. We see Toshiba Machine Co., Ltd. UFC-200P ultra-precision machining machine, is the use of air bearings. On this machine, the accuracy of a laser mirror that has been ultra-precision machined with diamond has reached a flatness of 0.06 μm and a surface finish of 0.01 μm. The use of air bearings ultra-precision machine tools, its high precision, rigidity is sufficient, less additional equipment, easy to use, low cost, so very popular. Toshiba Machine Co., Ltd. manufactures air bearings of various sizes and shapes for sale. Hitachi Seiki Co., Ltd. manufactures ultra-precision cutting machines using air bearings for the cutting of electronic computer disks. There are also Fuji Yue Co., Ltd. and Japan Seiko Co., Ltd. also have air bearing spindle and rail products. We have seen that the precision and surface finish of parts machined from air-bearing ultra-precision machining machines by several Japanese units are high. Although Japan started late in this respect than the United States, it is not overdone because it can catch up with Japan’s level in this area to catch up with that of the United States.