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近年来掺稀土元素的Ⅲ—V族化合物研究在基础物理和器件应用方面都越来越引起人们的关注,其中又由于Er~(3+)的~4I_(13/2)—4~I——(15/2)的特征发光波长为1.54μm,恰好对应于石英光纤的低损耗区,且离子注入技术简单易行,因而倍受重视.国际上已报道了不少有关Er注入Ⅲ—V族化合物的研究,大多选用较低的注入剂量(约10~(12)～10~(14)Er/cm~2),而对较高剂量的注入有待于进一步研究.
In recent years, rare earth elements Ⅲ-V compound research in the field of basic physics and device applications are more and more attention, of which Er ~ (3 +) ~ 4I_ (13/2) -4 ~ I- - (15/2) has a characteristic emission wavelength of 1.54μm, which corresponds to the low loss region of quartz fiber, and the ion implantation technology is simple and easy to operate, so much attention has been reported. Most of the compounds used in this study were lower injection doses (about 10 ~ (12) ~ 10 ~ (14) Er / cm ~ 2). However, higher dose injection is yet to be further studied.