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采用溶胶-凝胶提拉技术制备了SiO2疏水减反膜.使用Nd:YAG激光(波长为1064nm,脉宽为7.5ns)采用“Ron1”方式对所得膜层进行了激光预处理.在预处理前后采用“1on1”方式考察了薄膜的激光损伤阈值的变化,使用原子力显微镜(AFM)观察了薄膜的表面形貌的变化,并使用多重分形谱(MFS)方法分析了薄膜分形结构的变化.结果表明经过激光预处理后薄膜的抗激光损伤阈值有了明显提高,均方根表面粗糙度(Rq)稍有减小,膜面变平整,多重分形谱宽度收缩,分形区间的分布均匀性改善.这说明经过激光预处理后薄膜表面微结构趋向规整,使之能够承受更强的激光的辐照.同时也说明借助多重分形谱可以获得更多薄膜表面结构变化的信息,多重分形谱是探索强激光对光学薄膜辐照作用机理的一个十分有用的方法.
The hydrophobic and antireflective film of SiO2 was prepared by sol-gel pulling technique.The laser was pretreated with “Ron1” laser using Nd: YAG laser (wavelength of 1064nm, pulse width of 7.5ns) The change of the laser damage threshold of the film was investigated by “1on1” method before and after the change of the film surface morphology was observed by atomic force microscopy (AFM), and the fractal structure of the film was analyzed by using the multifractal spectrum (MFS) The results showed that the laser induced laser damage threshold of the film was significantly improved, and the root mean square roughness (Rq) slightly decreased, the film surface flattened, the width of the fractal spectrum shrinking, and the distribution uniformity improved. This shows that the microstructure of the surface of the film after laser pretreatment tends to be regular so that it can withstand the laser irradiation more.At the same time, it shows that the multifractal spectrum can obtain more information of the surface structure of the film, A very useful method for the mechanism of laser irradiation on optical films.