Nanosized Mn-doped ZnO particles were synthesized using a vapour phase growth method.The x-ray analysis reveals a wurtzite ZnO structure with smallexpansion of the lattice constants due to the doping of Mn in ZnO.The TEM analysis shows that the nanoparticles have an average diameter around 37nm,and energy dispersive spectroscopy detection on single nanoparticle indicates that the manganese concentration is around 3.5at.%.Magnetization measurements under field cooling conditions reveal that the as-grown Mn-doped ZnO nanoparticles show paramagnetic behaviour.This work demonstrates that Mn can be doped into nanosized ZnO structures via vapour phase growth,which represents an important step towards the synthesis of nanosized diluted magnetic semiconductors.