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设计和分析了一种基于SOI(绝缘体上的硅)脊型波导非对称马赫曾德尔结构的集成矢量和微波光子移相器。对于10 GHz的微波信号,设定非对称两臂的长度差为3 983μm时,其相应的时间延迟约为47 ps。分别在两臂上集成了一个热光可调谐可变光衰减器用于光学调谐,当衰减单元的折射率在0~6×10-3变化时,实现了10 GHz微波信号在0~180°的相位调谐。该器件尺寸小、结构紧凑,易于实现片上集成,在光控相控阵雷达中很有应用前景。
An integrated vector and microwave photon phase shifter based on asymmetric Mach-Zehnder structure of SOI (silicon on insulator) ridge waveguide was designed and analyzed. For a 10 GHz microwave signal, setting the asymmetry length difference between the two arms to 3 983 μm has a corresponding time delay of about 47 ps. A thermo-optic tunable variable optical attenuator is respectively integrated on the two arms for optical tuning. When the refractive index of the attenuating unit is varied from 0 to 6 × 10-3, a 10 GHz microwave signal is achieved at 0-180 ° Phase tuning. The small size of the device, compact structure, easy to achieve on-chip integration, light control phased array radar is very promising.