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设计了一套迈克耳孙白光干涉仪系统用于测量光学薄膜的反射相位,并由此反推单层薄膜的物理厚度。为补偿传统算法获取相位所存在的误差,提出一种新算法,以线性拟合结果作为初始猜想,采用多变量优化拟合总光程差曲线得到光学薄膜的相位。通过数值模拟的方式论证了理论上的可行性和高计算精度。采用多变量优化的手段进行处理实际测试的一组单层TiO2薄膜,所得物理厚度值与传统的光度法测试反演结果非常吻合。该测试系统和处理算法为快速精确测量光学薄膜厚度提供了一种新的解决方案。
A Michelson white-light interferometer system was designed to measure the reflection phase of an optical film and inversely predict the physical thickness of the single-layer film. In order to compensate for the error existing in the traditional algorithm, a new algorithm was proposed. Using the linear fitting result as the initial guess, the phase of the optical thin film was obtained by multivariable optimization fitting the total optical path difference curve. Through the numerical simulation, the feasibility of the theory and the high calculation accuracy are demonstrated. A set of single-layer TiO2 films were processed by multivariate optimization. The obtained physical thickness values are in good agreement with the conventional photometric method. The test system and processing algorithms provide a new solution for quickly and accurately measuring the optical film thickness.