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采用脉冲ＴＥＡＣＯ２激光诱发ＳＩＨ４＋ＣＨ４等离子体化学气相反应，合成了粒度分布均匀的纳米ＳｉＣ球型陶瓷粉末，采用傅里叶红外光谱、Ｘ射线衍射、元素分析、透射电子显微镜等多种技术对粉末性能进行了分析，利用光学发射谱技术对反应过程进行了初步研究。
Pulsed TEACO2 laser induced SIH4 + CH4 plasma chemical vapor phase reaction to synthesize nano-sized SiC spherical ceramic powder with uniform particle size distribution. The powder properties were characterized by Fourier transform infrared spectroscopy, X-ray diffraction, elemental analysis and transmission electron microscopy The analysis, the use of optical emission spectroscopy to conduct a preliminary study of the reaction process.