2014年1月18-19日,由国家三部委(科技部、财政部、发改委)和北京市联合组织,02专项实施管理办公室牵头,对北京中科信公司承担的“90-65纳米大角度离子注入机研发及产业化”项目进行验收,来自装备、工艺、集成电路制造、财务等领域的国家层面的专家和各级领导40余人参加了项目验收工作。 From January 18 to January 19, 2014, the three national ministries (Ministry of Science and Technology, Ministry of Finance, NDRC) and Beijing Joint Organization and 02 Special Implementation Management Office take the lead in undertaking “90-65 nanometer large Angle ion implantation machine R & D and industrialization ”project acceptance, from the equipment, process, integrated circuit manufacturing, finance and other fields at the national level experts and leaders at all levels attended more than 40 people in the project acceptance.