基于液压传递原理 ,设计出一种用动态化学腐蚀法制备大锥角近场光纤探针的装置 .实验结果表明 ,在传统的化学腐蚀法制备光纤探针的过程中 ,通过控制腐蚀液液面的上升速度 ,可以有效地控制探针针尖的形状以及锥角的大小 .在此基础上 ,还论述了分步控制光纤与腐蚀液液面的相对位移的方法在大锥角光纤探针的制备中所具有的独特优越性 .利用所制备的大锥角近场光纤探针在扫描近场光学显微镜上对直径为 2 0 0nm的小球进行探测 ,其力学像证实该探针具有较高的形貌分辨率 (约为 5 0nm) . Based on the principle of hydraulic transmission, a device for preparing the large-angle-angle near-field optical fiber probe by dynamic chemical etching was designed.The experimental results show that in the process of preparing the optical fiber probe by the chemical etching method, , Which can effectively control the shape of the probe tip and the size of the cone angle.On the basis of this, the method of stepwise control of the relative displacement of the optical fiber and the liquid surface of the etching solution is also discussed. Has the unique advantages of the use of prepared by the near-field optical probe with a large cone angle in the near-field optical microscope scanning diameter of 200 nm for the probe, the mechanical image confirmed that the probe has a higher Morphology resolution (about 5 0nm).