描述了一种用无掩模各向异性腐蚀技术制造对称体微机械梁质量块加速度传感器的结构。由于梁在质量块中心对称位置上，在结构上消除了加速度传感器的横向灵敏度效应。在对四梁结构及悬臂梁结构加速度计灵敏度及固有频率进行分析的基础上，用灵敏度频率积取优值的方法进行加速度计的结构参数优化。采用了一种新颖的微力微位移天平测试方法，初步测量了加速度计结构的静态特性。 A structure of symmetric micro-mechanical beam-mass acceleration sensor fabricated by maskless anisotropic etching is described. Due to the symmetrical position of the beam in the center of the mass, the lateral sensitivity effect of the acceleration sensor is eliminated structurally. Based on the analysis of sensitivity and natural frequency of four-beam structure and cantilever accelerometer, the structural parameters of the accelerometer are optimized by the method of sensitivity-frequency product. A novel micromechanical displacement test method was adopted to measure the static characteristics of the accelerometer structure.