本文主要讨论利用扫描电镜及其外加电路,对集成电路的失效进行分析的方法——电压衬度法.1 电压衬度机理电子束电压衬度机理是由二次电子出射与表面电位效应确定的,也就是说,二次电子的放出率及其能量与样品电位的分布有关.一般来说,当给集成电路施加电压且某些表面电位 This article mainly discusses the use of scanning electron microscopy and its additional circuit analysis of the failure of the integrated circuit method - voltage contrast method.1 Voltage contrast mechanism Electron beam voltage contrast mechanism is determined by the secondary electron emission and surface potential effects , That is, the rate of emission of secondary electrons and their energy are related to the distribution of the sample potential.In general, when a voltage is applied to an integrated circuit and some surface potential