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垂直外腔面发射激光器(VECSEL)可以实现大功率的高光束质量输出。针对外腔制作工艺复杂、腔体结构松散的缺点,研制了一种介质膜集成衬底表面外腔底面发射激光器。将衬底表面生长的多层介质绝缘薄膜与N-DBR、P-DBR共同构成复合腔结构,衬底充当外腔。该结构能够抑制高阶模式,进而优化输出光谱及远场发散角等光束特性。在已有的理论指导下,制作了有源区直径为200μm、外腔腔长250μm的VECSEL。室温下,向器件连续直流注入3.4 A,测试得到输出功率为260 m W,远场发散角的半角宽度为3.8°,光谱半高全宽为0.046 nm。与常规结构底面发射VCSEL进行比较,发现VECSEL器件的光束质量得到了明显改善,实验结果与理论仿真结果有较好的一致性。
Vertical external cavity surface emitting lasers (VECSELs) enable high-power, high beam quality output. Aiming at the shortcomings of complex fabrication of external cavity and loose structure of cavity, a lasing laser with dielectric film on the surface of the substrate is designed. The multi-layer dielectric insulating film grown on the surface of the substrate together with N-DBR and P-DBR forms a composite cavity structure, and the substrate serves as an external cavity. This structure can suppress the higher-order mode and further optimize the beam characteristics such as the output spectrum and the far-field divergence angle. Under the existing theory, a VECSEL with an active area of 200μm and an external cavity of 250μm has been fabricated. The device was continuously DC injection of 3.4 A at room temperature, the output power was 260 mW, the half-width of the far-field divergence angle was 3.8 °, and the full width at half maximum of the spectrum was 0.046 nm. Compared with the VCSEL emission from the bottom of the conventional structure, the beam quality of the VECSEL device has been significantly improved. The experimental results are in good agreement with the theoretical simulation results.