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介绍微电子学中精密电阻的激光微调原理、系统组成及微调方法。对系统中几个主要单元技术设计思想以及应用中一些关键技术作了具体说明。
Introduce the principle of laser fine-tuning precision resistor in microelectronics, system composition and fine-tuning method. Several key elements in the system design ideas and applications of some of the key technologies made a specific description.