论文部分内容阅读
以钛酸丁酯为原料，无水乙醇为溶剂，添加适量稳定剂制成稳定溶胶，用浸涂法在 Ａｌ２Ｏ３基片上制备 ＴｉＯ２薄膜，经 １０００ ℃ Ｈ２下还原制得 ＴｉＯ２－ｘ薄膜，在钼酸铵溶胶中浸泡一定时间得到掺钼薄膜实验结果表明掺钼薄膜元件在 ８００ ℃下的氧敏感性和重复性比未掺杂时提高， ＴｉＯ２－ｘ薄膜的电阻的温度稳定性好通过对薄膜的ＸＰＳ分析探讨了钼在薄膜中的作用机理
Titanium tetrabutoxide was used as raw material, anhydrous ethanol was used as solvent, and proper amount of stabilizer was added to make a stable sol. TiO2 film was prepared on Al2O3 substrate by dipping method and TiO2-x film was prepared by reduction under H2 at 1000 ℃. The results show that the oxygen sensitivity and repeatability of the molybdenum-doped thin film device at 800 ℃ are higher than that of undoped, the temperature stability of the resistance of the TiO2-x film is good. XPS analysis of the mechanism of action of molybdenum in the film