本文描述了无机物在真空中进行高速电子束蒸发的工艺过程,以及控制厚凝聚层(涂膜)沉积、结构和性能的工艺参数。考察了某些厚度从几微米到几毫米的单相和多相的金属、金属-陶瓷、陶瓷合金和陶瓷的凝聚例子,包括结构元素尺寸范围很宽的弥散、多层、多孔和多层分级结构的凝聚层。记录了结构的尺寸效应和厚凝聚层的机械性能,也对用蒸气相沉积无机材料的实际应用领域作了介绍。 This article describes the process of high-speed electron beam evaporation of inorganics in a vacuum and the process parameters that control the deposition, structure, and performance of the thick coacervate (coating). Some examples of the condensation of single and multiphase metals, metal-ceramics, ceramic alloys and ceramics with thicknesses from a few microns to a few millimeters include diffuse, multi-layered, porous and multi-layered grading with a wide range of structural element sizes Structure of the cohesion layer. The size effect of the structure and the mechanical properties of the thick coacervate were also recorded, as well as the field of practical application of vapor deposited inorganic materials.