由于发现氧化铜基材料有高于90K的超导转变温度时,就强烈的促使人们了解超导性机理和寻找在液氮温度或液氮温度以上工作的超导器件。化学湿法刻蚀广泛的用于器件制造或器件参数测量的高Tc超导薄膜。对于干法处理,离子刻蚀有几种方法,如运用 The discovery that copper oxide based materials have superconducting transition temperatures above 90K has strongly prompted the understanding of superconductivity mechanisms and the search for superconducting devices that operate above liquid nitrogen or liquid nitrogen temperatures. Chemical wet etching Extensive high-Tc superconducting films for device fabrication or device parameter measurement. For dry processing, ion etching there are several ways, such as the use