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用激光全息照相的方法,一次形成一个掩模的多重象以代替集成电路制版工艺中的重复步进照相的过程,这样可以保证不同掩模的精确套准,能够省略复杂的重复步进的电控和精密机械装置,而且还可以缩短生产周期,降低劳动强度。 为了发展我国的电子工业,我们对用激光全息照相来制造掩模版的工作进行了试验。经过一年多来的工作,在兄弟单位的支持下,取得了初步成果,已能具体应用于一些线条不很细的版子生产上。 用全息图产生多重象,基本上有两种光路,一种是由光点阵的严格的富里叶变换全息图利用通常的空间滤波器装置形成多重象;另一种是由光点阵的无透镜富里叶变换全息图得到多重象。后者光路简单,对镜头要求低,成象质量高,所以我们采用了后者,它的光路如图1所示。
By laser holography, multiple images of one mask are formed at a time in lieu of repeated step-and-shoot processes in an integrated circuit platemaking process, which ensures accurate registration of different masks and eliminates the need for complex repetitively stepped electrical Control and precision machinery, but also can shorten the production cycle and reduce labor intensity. In order to develop our country’s electronics industry, we tested the work of making a reticle by laser holography. After more than a year of work, with the support of the brothers and units, has achieved initial results, has been specifically applied to some lines are not very fine version of the production. The use of holograms to produce multiple images, there are basically two optical paths, one is a lattice of strict lattice Fourier transform holograms using conventional spatial filter device to form multiple images; the other is by the optical lattice of no The lens Fourier transform hologram gives multiple images. The latter light path is simple, low requirements on the lens, image quality, so we use the latter, its light path shown in Figure 1.