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锆钛酸铅(PZT)已广泛地用作声体波和表面波(SAW)器件的压电换能器材料。本文介绍一种新颖的激光-超声技术,用来测量PZT的声表面波特性,以便控制其质量。
Lead zirconate titanate (PZT) has been widely used as a piezoelectric transducer material for acoustic and surface wave (SAW) devices. This article describes a novel laser-ultrasound technique used to measure the surface acoustic wave properties of PZT in order to control its quality.