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利用光交流加热法测量了3个单层的金刚石膜试样平行于表面方向的热扩散率,再根据金刚石体积比热容的公认值,确定金刚石膜的热导率.测量结果表明,不同工艺条件下制备的金刚石膜,其热导率可以有很大的差别.3个样品中,测得的热导率最低值为0.50W/cm·K,最高值为7.70W/cm·K,这些差别与工艺参数甲烷气含量密切相关.测量了2个样品热导率在室温和160℃之间的变化,热导率与温度的关系由金刚石内部多种散射机制决定.对光交流加热法测量,如金刚石膜那样高热扩散率样品存在的端部效应引起的原理误差作了分析和修正.
The thermal diffusivities of three single-layer diamond films were measured by optical alternating current (AC) heating method, and the thermal conductivity of the diamond films was determined according to the accepted value of the volume specific heat capacity of the diamond films. The measurement results showed that the thermal conductivity The thermal conductivity of the prepared diamond films can vary greatly, among the three samples, the lowest value of thermal conductivity is 0.50W / cm · K and the highest value is 7.70W / cm · K, Process parameters of methane gas content is closely related to the two samples measured the thermal conductivity at room temperature and 160 ℃, the relationship between thermal conductivity and temperature by a variety of scattering mechanisms within the diamond decision for the AC heating method, such as The principle error caused by the end effect of high thermal diffusivity samples such as diamond film was analyzed and corrected.