采用MIP-800C多功能离子渗镀设备,分别在H13钢表面及经表面渗氮后的H13钢表面渗镀TiN薄膜。对两种状态下渗镀的TiN薄膜层的形貌与相组成进行观察分析,并检测了其显微硬度及膜基结合力。结果表明,经表面渗氮后的H13钢表面渗镀的TiN薄膜较光滑致密,少有大颗粒出现;其显微硬度比未经表面渗氮渗镀的略高(由1831 HV0.025提高到2107HV0.025),而膜基结合力(78 N)约为后者(44 N)的两倍。预先对H13钢进行表面渗氮能显著提高渗镀的TiN薄膜与基体的结合力及其力学性能。 Using MIP-800C multi-functional ion plating equipment, respectively, in the H13 steel surface and the surface after nitriding H13 steel infiltration TiN film. The morphologies and phase compositions of TiN thin films were observed and analyzed under both conditions, and their microhardness and film-based bonding strength were tested. The results show that the TiN films infiltrated on the surface of H13 steel after nitriding are smoother and less dense, and the microhardness is slightly higher than that of the non-surface nitriding (from 1831 HV0.025 to 2107HV0.025), while membrane-based binding (78 N) is about twice that of the latter (44 N). Nitriding nitriding on H13 steel significantly improves the bonding strength and mechanical properties of the TiN film.