在用线性系统和随机过程理论分析光刻机误差传递特性的基础上，采用时间序列分析法建立误差的数学模型，提出了综合误差修正的新方法，介绍了微机综合误差实时修正系统的电路结构与工作原理。其主要特点是，不仅能修正系统误差，而且能够根据对随机误差的预报来修正相关的动态误差。实验结果表明，系统修正精度达到±０．１μｍ。 Based on the linear system and stochastic process theory, the mathematical model of error is established by time series analysis and a new method of integrated error correction is introduced. The circuit structure of the integrated error correction system is introduced And working principle. Its main feature is that it can not only correct the system error, but also correct the related dynamic error according to the prediction of random error. Experimental results show that the system correction accuracy of ± 0.1μm.