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在含量均匀度检查中,结果受随机性方法误差的影响。理论上,采用根据统计参数制定的计量型方案时,这种误差可按误差叠加原理减免。本文从理论与实践的结合上阐明了这种误差如何影响含量均匀度检查的结果,首次在所制定的含量均匀度计量型检查方案中进行了减免这种误差影响的研究,进一步提高了含量均匀度检查结果的准确性,更充分体现了计量型检查方案的优越性。
In the content uniformity check, the results are affected by random method errors. In theory, the use of measurement based on statistical parameters of the program, this error can be reduced according to the principle of error superposition. In this paper, the combination of theory and practice illustrates how this kind of error affects the result of content uniformity checking. For the first time, the impact of this kind of error reduction on exemption and avoidance is tested in the developed content uniformity measurement-based inspection scheme, which further improves the content uniformity Degree of accuracy of the test results, more fully reflect the advantages of measurement-based inspection program.