日本东京大学精密工学研究所新近开发成功一种利用非晶合金薄膜材料借助于静电驱动的锥形螺旋弹簧微型致动器 ,系世界首创制品。该致动器利用锆基非晶金属薄膜在一定的温度范围保持液态过冷熔体的性质加工成锥形螺旋弹簧形状的可动电极 ,并与在硅基片上分割成 4部分的基片电极 Japan Institute of Precision Engineering, University of Tokyo recently developed a successful use of amorphous alloy thin film material by means of electrostatic drive cone coil spring micro actuator, the world’s first product. The actuator was fabricated using a zirconium-based amorphous metal film in the form of a conical coil spring movable electrode maintaining the liquid subcooled melt at a certain temperature range and was bonded to a substrate electrode divided into four parts on a silicon substrate