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本文介绍一种石英晶体薄膜测厚的差动工作方式.它的厚度测量精度为1nm,分辨率为纳米级,其温度稳定性在0~十400℃范围内达到50Hz.这种差动测量技术不仅可在真空镀膜工艺中实现在线测量,而且在纳米技术及超精细加工中具有广阔应用前景.
This paper presents a differential mode of operation for quartz crystal film thickness measurement with a thickness of 1 nm and a resolution of nanometers with a temperature stability of 50 Hz in the range of 0 to 10 400 ° C. This differential measurement technique Not only in the vacuum coating process to achieve online measurement, but also in nanotechnology and ultra-fine processing has broad application prospects.