一、概述 油增压泵是用来获得10-2～10-3乇压力的主要真空泵之一,它也可以做为油扩散泵的前级真空泵。这种泵的极限真空约为10-4乇。在10-2～10-3乇内有较高的抽气速率(泵口单位面积抽速为2.5～3.5升/秒·厘米2),当泵口压力再增加时,虽抽气速率有所下降,但抽气量却有一定的增加 First, an overview of the oil booster pump is used to obtain 10-2 ~ 10-3 Torr pressure of one of the main vacuum pump, it can also be used as a front-stage oil diffusion pump vacuum pump. The pump’s ultimate vacuum is about 10-4 Torr. In the 10-2 ~ 10-3 Torr within a higher pumping rate (pumping unit pumping speed per unit area of ​​2.5 to 3.5 liters / s · cm 2), when the pump pressure increases, although the pumping rate of some Decline, but there is a certain increase in pumping capacity