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通过对微电容式压力传感器的结构和工作原理进行分析,建立基于模糊模型法的数学模型,开发相应的算法程序,对微电容式压力传感器进行稳健设计。对结果分析表明,稳健设计结果对噪声因素的误差是不敏感的。
Through the analysis of the structure and working principle of the micro-capacitance pressure sensor, the mathematical model based on the fuzzy model method is established, the corresponding algorithm program is developed and the micro-capacitance pressure sensor is designed steadily. Analysis of the results shows that robust design results are insensitive to errors in noise factors.