一、前言碲锡铅(PbSnTe)是目前国内外正在广泛而深入研究的一种Ⅳ—Ⅵ族合成固溶体化合物。它不仅是用来制造长波红外探测器的本征半导体材料,而且也是激光长波接收器材料。在用于高分辨率的长波扫描装置方面,它和HgCdTe阵列相竞争。采用高频溅射法是深入研制具有光电导性能的PbSnTe薄膜的途径之一。 I. INTRODUCTION PbSnTe is currently a kind of Ⅳ-Ⅵ synthetic solid solution compound that is widely and thoroughly studied at home and abroad. It is not only used to manufacture long-wave infrared detector of the intrinsic semiconductor materials, but also long-wave laser receiver material. It competes with the HgCdTe array in terms of long wave scanning devices for high resolution. The use of high-frequency sputtering method is one of the ways to further develop photoconductive PbSnTe films.