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进行多座标(如三座标)测量时,一般都必须在每个座标轴方向单独安装一套作为测量基准的传感系统。本文介绍了双频激光干涉的工作原理,这种基于干涉原理的位移测量系,据称可同时进行多至六个轴线方向的位移测量。文章就利用一台双频激光干涉仪同时进行二个座标的测量情况提出了报告。测量结果的逻辑处理,导轨运动的实际轨迹形状与名义形状的比较以及测量结果的偏差值图形表示等工作是由一台台式计算机连同一台记录器来完成的。这是利用双频激光干涉仪对多轴自动机床的运动轨迹进行研究(精密测量)方面的新发展。
For multi-coordinate (eg, three-coordinate) measurements, it is common practice to mount a single sensing system as a measurement reference in each coordinate axis. This article describes the working principle of dual-frequency laser interference. This displacement measurement system based on the principle of interference is said to measure displacement in up to six axes simultaneously. The paper presents a report on the simultaneous measurement of two coordinates using a dual-frequency laser interferometer. Logical processing of the measurements, comparison of the actual trajectory shape of the track with the nominal shape, and graphical representation of the deviation of the measurement results are performed by a desktop computer together with a recorder. This is the use of dual-frequency laser interferometer on the trajectory of multi-axis automatic machine research (precision measurement), the new development.