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Ⅰ导论 近年来,俄歇电子谱学和X射线光电子谱学已作为能够确定表面化学成分的、实际可行的分析技术出现。其中,俄歇电子谱学在研究内界面偏聚方面倍受重视。电子束聚焦的先进技术已导致发展成为扫描俄歇电子微探针(SAM),这就使研究非均质表面所必需的成分分布图象及空间分辨技术可能实现。而ESCA听具有的能够确定化学状态的本领又使这种技术在某些
I. INTRODUCTION In recent years, Auger electron spectroscopy and X-ray photoelectron spectroscopy have emerged as practical analytical techniques for determining the surface chemical composition. Among them, Auger electron spectroscopy has paid much attention to the study of segregation in the interface. Advances in electron beam focusing have led to the development of scanning Auger electron microprobes (SAMs), which makes possible the investigation of the compositional distribution images and spatial resolution techniques necessary for non-homogeneous surfaces. ESCA has the ability to determine the state of the chemical technology and make this technology in some