论文部分内容阅读
研究了工艺参数对 TiN 的形成和镀层性质(如硬度、组织、晶体结构和耐磨性)的影响。用带有正偏压探测极的反应性离子镀技术在高速钢基板上沉积 TiN。由于探测极上带有正电位,在熔融钛的坩埚上方形成活性区域,从而加速钛和氮之间的反应。在探测极电流为150毫安、氮分压为9.3×10~(-2)巴、基极温度为500℃的条件下,所形成 TiN镀层的努普硬度约为 HK=1750(载荷为10克,镀膜厚度为5微米)。与相同热处理情况下未镀渗的高速钢相比,它具有极为优良的耐磨性。
The effect of process parameters on the formation of TiN and the properties of coatings such as hardness, microstructure, crystal structure and wear resistance was studied. TiN is deposited on a high speed steel substrate using a reactive ion plating technique with a positive bias probe. Due to the positive potential on the probe pole, an active region is formed over the molten titanium crucible to accelerate the reaction between titanium and nitrogen. Under the conditions of a probe current of 150 mA, a partial pressure of 9.3 × 10 ~ (-2) bar and a base temperature of 500 ℃, the Knurle hardness of TiN coating is approximately HK = 1750 (load is 10 G, coating thickness of 5 microns). Compared with the same high-speed steel without infiltration under the condition of heat treatment, it has very good wear resistance.