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本文使用金刚石磨料作为晶种颗粒,通过热丝化学气相法生长出单晶金刚石颗粒,并且建立三维的有限元模型,利用有限元仿真分析了生长过程中影响金刚石磨料生长速率以及沉积质量的各种因素,如热丝的排列方式,衬底的温度场,以及晶种的分布方式。通过固定在热丝CVD反应腔里的热电偶测量了实际的衬底温度分布,从而验证了仿真结果的正确性。另外,通过改变仿真模型优化了沉积单晶金刚石颗粒的工艺参数,获得适应于合成单晶金刚石颗粒的新技术,为化学气相沉积合成单晶金刚石颗粒奠定了基础,也为高温高压金刚石磨料品级的改进与提高提供了新途径。
In this paper, diamond abrasive was used as seed particles, and single crystal diamond particles were grown by hot filament chemical vapor deposition. Three-dimensional finite element models were established. The influences of various factors on diamond abrasive growth rate and deposition quality were analyzed by finite element simulation Factors, such as hot wire arrangement, the substrate temperature field, and seed distribution. The actual substrate temperature distribution was measured by a thermocouple fixed in the hot wire CVD chamber, which verified the correctness of the simulation results. In addition, by changing the simulation model, the process parameters of single crystal diamond particles are optimized, and the new technology of synthesizing single crystal diamond particles is obtained, which lays the foundation for synthesizing single crystal diamond particles by chemical vapor deposition and also for high temperature and pressure diamond abrasive grade Improve and improve provides a new way.