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本文详细分析了MIM有源薄膜器件及阵列的工作原理、工艺过程和器件性能.根据一种液晶有源薄膜器件阵列设计模型,设计和研制出了MIM单管性能和实验用7×5象素MIM有源矩阵液晶显示板.此显示板具有显示一定图形的功能.
In this paper, the working principle, process and device performance of MIM active thin film devices and arrays are analyzed in detail.According to an LCD array design model, a MIM single tube performance and experiment with 7 × 5 pixels MIM active matrix liquid crystal display panel. This display panel has the ability to display a certain pattern.