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为提高聚合物光波导放大器的增益性能,利用高温法合成了Ba Lu F5∶Yb3+,Er3+纳米晶,并分别对纳米晶的形貌、晶体结构和近红外发射特性进行了表征。测试结果表明,纳米晶平均粒径为13 nm,并在1 530 nm处具有较强的发射,荧光半高宽为50 nm。将合成的纳米晶掺杂入SU-8聚合物作为光波导放大器的芯层材料,使用光刻显影等工艺,在表面长有二氧化硅的硅衬底上制备出了聚合物光波导放大器。当980 nm波长泵浦光功率为280 m W、信号光波长为1 530 nm且功率为0.1 m W时,在长度为1.1 cm的光波导放大器中,获得了3.95 d B的相对增益。
In order to improve the gain performance of polymer optical waveguide amplifier, Ba Lu F5:Yb3 + and Er3 + nanocrystals were synthesized by high temperature method. The morphology, crystal structure and near-infrared emission characteristics of nanocrystals were characterized. The results show that the average diameter of the nanocrystals is 13 nm, and the emission is strong at 1 530 nm with a FWHM of 50 nm. The synthesized nanocrystals were doped into the SU-8 polymer as the core material of the optical waveguide amplifier, and a polymer optical waveguide amplifier was prepared on a silicon substrate with silicon dioxide on the surface using photolithography and the like. The relative gain of 3.95 d B was obtained for an optical waveguide amplifier with a length of 1.1 cm when the pump light power at 980 nm was 280 mW and the signal light wavelength was 1 530 nm and the power was 0.1 mW.